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Wafer Fabrication: Automatic Material Handling System (Hardcover)

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Description


This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

About the Author


Jie Zhang, Shanghai Jiaotong University, Shanghai, China

Product Details
ISBN: 9783110486902
ISBN-10: 3110486903
Publisher: de Gruyter
Publication Date: September 24th, 2018
Pages: 284
Language: English