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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Hardcover)

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions Cover Image
By Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo
$160.00
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Description

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Product Details
ISBN: 9780815512202
ISBN-10: 0815512201
Publisher: William Andrew
Publication Date: December 31st, 1990
Pages: 546
Language: English
Series: Materials Science and Process Technology
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